Forged Products for Vacuum Device Chamber Walls

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Integral Molding for Parts Requiring High Vacuum

Picture of Forged Products for Vacuum Device Chamber Walls

The walls of large chambers in LCD and semiconductor fabrication equipment are typically made of rolled materials that are welded. However, this arrangement necessitates post-production testing for leaks. Using instead cast parts formed through integral molding avoids the added cost of molding the rolled material.

Features

  • A large chamber measuring more than 2.5 meters can be manufactured all at once.
  • As the forged part is produced through integral molding, there are no welding joints, making it stronger and providing a greater vacuum.
  • As the piece is free forged, no dies, jigs or other tools are needed. This allows highly varied, small-lot production. (Even single-piece production is possible.)

Delivered Shapes

Delivery in forged state

Picture of Delivery in forged state

Length of outer wall 2,760 × 3,155 mm
Length of inner wall 2,320 × 2,720 mm
Height 435 mm
Product weight 2,775 kg

Delivery in roughly finished part

Picture of Delivery in roughly finished part

Length of outer wall 2,210 × 2,210 mm
Length of inner wall 2,030 × 2,030 mm
Height 665 mm
Product weight 1,260 kg

Production Facilities

15,000-ton
forging press

Picture of 15,000-ton forging press

Manipulator for handling forged elements

Picture of Manipulator for handling forged elements

Equipment for machining large parts

Picture of Equipment for machining large parts