Forged Products for Vacuum Device Chamber Walls
Integral Molding for Parts Requiring High Vacuum
The walls of large chambers in LCD and semiconductor fabrication equipment are typically made of rolled materials that are welded. However, this arrangement necessitates post-production testing for leaks. Using instead cast parts formed through integral molding avoids the added cost of molding the rolled material.
Features
- A large chamber measuring more than 2.5 meters can be manufactured all at once.
- As the forged part is produced through integral molding, there are no welding joints, making it stronger and providing a greater vacuum.
- As the piece is free forged, no dies, jigs or other tools are needed. This allows highly varied, small-lot production. (Even single-piece production is possible.)
Delivered Shapes
Delivery in forged state
| Length of outer wall | 2,760×3,155 mm |
|---|---|
| Length of inner wall | 2,320×2,720 mm |
| Height | 435 mm |
| Product weight | 2,775 kg |
Delivery in roughly finished part
| Length of outer wall | 2,210×2,210 mm |
|---|---|
| Length of inner wall | 2,030×2,030 mm |
| Height | 665 mm |
| Product weight | 1,260 kg |
Production Facilities
15,000-ton
forging press
Manipulator for handling forged elements
Equipment for machining large parts
